Traditional drilling techniques are limited by the need for large axial forces & holding torques, high power consumption and heavy equipment. Ultrasonic drilling, as a new drilling method, remedies these defect of traditional drilling techniques with broad application prospects, especially in the field of extraterrestrial exploration which demands the low gravity and strict limit on equipment weight. This paper introduced the development of ultrasonic drilling device; and by the analysis on the existing ultrasonic drilling equipment, emphatically analyzed a kind of ultrasonic drilling equipment for extraterrestrial exploration program. The feasibility of ultrasonic drilling technology applied in the extraterrestrial exploration and the application development trend were summarized.